Invention Grant
- Patent Title: Fin transistor structure and method of fabricating the same
- Patent Title (中): 翅片晶体管结构及其制造方法
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Application No.: US13077858Application Date: 2011-03-31
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Publication No.: US08441050B2Publication Date: 2013-05-14
- Inventor: Zhijiong Luo , Huilong Zhu , Haizhou Yin
- Applicant: Zhijiong Luo , Huilong Zhu , Haizhou Yin
- Applicant Address: CN Beijing
- Assignee: Institute of Microelectronics, Chinese Academy of Sciences
- Current Assignee: Institute of Microelectronics, Chinese Academy of Sciences
- Current Assignee Address: CN Beijing
- Agency: Knobbe, Martens, Olson & Bear LLP
- Priority: CN201010112521 20100212
- Main IPC: H01L29/76
- IPC: H01L29/76 ; H01L27/12 ; H01L21/336

Abstract:
A fin transistor structure and a method of fabricating the same are disclosed. In one aspect the method comprises providing a bulk semiconductor substrate, patterning the semiconductor substrate to form a fin with it body directly tied to the semiconductor substrate, patterning the fin so that gaps are formed on the bottom of the fin at source/drain regions of the transistor structure to be formed. This is performed wherein a portion of the fin corresponding to the channel region of the transistor structure to be formed is directly tied to the semiconductor substrate, while other portions of the fin at the source/drain regions are separated from the surface of the semiconductor substrate by the gaps. Also, filling an insulation material into the gaps, and fabricating the transistor structure based on the semiconductor substrate with the fin formed thereon are disclosed. Thereby, it is possible to reduce the leakage current while maintaining the advantages of body-tied structures.
Public/Granted literature
- US20110198676A1 FIN TRANSISTOR STRUCTURE AND METHOD OF FABRICATING THE SAME Public/Granted day:2011-08-18
Information query
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