Invention Grant
- Patent Title: Shared membrane thermopile sensor array
- Patent Title (中): 共享膜热电堆传感器阵列
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Application No.: US13088242Application Date: 2011-04-15
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Publication No.: US08441093B2Publication Date: 2013-05-14
- Inventor: Arthur J. Barlow , Hermann Karagoezoglu , Jin Han Ju , Fred Plotz , Radu M. Marinescu
- Applicant: Arthur J. Barlow , Hermann Karagoezoglu , Jin Han Ju , Fred Plotz , Radu M. Marinescu
- Applicant Address: SG Solaris
- Assignee: Excelitas Technologies Singapore Pte. Ltd.
- Current Assignee: Excelitas Technologies Singapore Pte. Ltd.
- Current Assignee Address: SG Solaris
- Agency: Sheehan Phinney Bass + Green PA
- Agent Peter A. Nieves
- Main IPC: H01L31/058
- IPC: H01L31/058 ; H01L29/06 ; H01L35/28
Abstract:
A thermopile sensor array is provided. The thermopile sensor array may include multiple pixels formed by multiple thermopiles arranged on a single common shared support membrane. A separation between the edge of the shared support membrane and the outermost thermopile(s) may be included to provide additional thermal isolation between the thermopile and an underlying silicon substrate.
Public/Granted literature
- US20120261785A1 SHARED MEMBRANE THERMOPILE SENSOR ARRAY Public/Granted day:2012-10-18
Information query
