Invention Grant
US08441094B2 Resonator element and resonator pixel for microbolometer sensor
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谐振器元件和微波探测器传感器的谐振器像素
- Patent Title: Resonator element and resonator pixel for microbolometer sensor
- Patent Title (中): 谐振器元件和微波探测器传感器的谐振器像素
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Application No.: US13202656Application Date: 2010-02-17
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Publication No.: US08441094B2Publication Date: 2013-05-14
- Inventor: Hubert Brueckl , Thomas Maier
- Applicant: Hubert Brueckl , Thomas Maier
- Applicant Address: AT Vienna
- Assignee: AIT Austrian Institute of Technology GmbH
- Current Assignee: AIT Austrian Institute of Technology GmbH
- Current Assignee Address: AT Vienna
- Agent Laurence A. Greenberg; Werner H. Sterner; Ralph E. Locher
- Priority: ATA290/2009 20090220
- International Application: PCT/AT2010/000044 WO 20100217
- International Announcement: WO2010/094051 WO 20100826
- Main IPC: H01L31/101
- IPC: H01L31/101
Abstract:
A resonator element for the absorption and/or conversion of electromagnetic waves having a predefined wavelength, in particular infrared radiation having a wavelength of 2 μm to 200 μm, into heat, has a three-layer structure formed of a first metal layer, a second metal layer and a dielectric layer interposed between the two metal layers. The maximum lateral dimension of the layers is in the range between one quarter and a half of the predefined wavelength.
Public/Granted literature
- US20110304005A1 RESONATOR ELEMENT AND RESONATOR PIXEL FOR MICROBOLOMETER SENSOR Public/Granted day:2011-12-15
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