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US08441108B2 Nitride semiconductor element having electrode on m-plane and method for producing the same 有权
在m面上具有电极的氮化物半导体元件及其制造方法

Nitride semiconductor element having electrode on m-plane and method for producing the same
Abstract:
A nitride-based semiconductor light-emitting device 100 includes: a GaN substrate 10 with an m-plane surface 12; a semiconductor multilayer structure 20 provided on the m-plane surface 12 of the GaN substrate 10; and an electrode 30 provided on the semiconductor multilayer structure 20. The electrode 30 includes a Zn layer 32 and a metal layer 34 provided on the Zn layer 32. The Zn layer 32 is in contact with a surface of a p-type semiconductor region of the semiconductor multilayer structure 20.
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