Invention Grant
US08441610B2 Assembly comprising a conditioning system and at least one object, a conditioning system, a lithographic apparatus and methods 失效
组件包括调节系统和至少一个物体,调节系统,光刻设备和方法

Assembly comprising a conditioning system and at least one object, a conditioning system, a lithographic apparatus and methods
Abstract:
An assembly including a conditioning system and an object moveable into and/or out of an area to be conditioned is disclosed. The conditioning system has fluid outlet passages to supply conditioning fluid to the area to be conditioned and is configured to adjust outflow of the conditioning fluid from the fluid outlet passages depending on a position of the object.
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