Invention Grant
US08441612B2 LED light source, its manufacturing method, and LED-based photolithography apparatus and method
失效
LED光源,其制造方法和基于LED的光刻设备和方法
- Patent Title: LED light source, its manufacturing method, and LED-based photolithography apparatus and method
- Patent Title (中): LED光源,其制造方法和基于LED的光刻设备和方法
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Application No.: US12815222Application Date: 2010-06-14
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Publication No.: US08441612B2Publication Date: 2013-05-14
- Inventor: Susumu Ishida , Shohei Hata
- Applicant: Susumu Ishida , Shohei Hata
- Applicant Address: JP Tokyo
- Assignee: Hitachi High-Technologies Corporation
- Current Assignee: Hitachi High-Technologies Corporation
- Current Assignee Address: JP Tokyo
- Agency: Foley & Lardner LLP
- Priority: JP2009-155179 20090630
- Main IPC: G03B27/54
- IPC: G03B27/54 ; H01L21/00 ; H01L33/00

Abstract:
This invention provides a structurally-simple LED light source that is capable of preventing temperature variations among its multiple LED elements arranged densely on its LED-mounting substrate and also improving the heat release capabilities of the substrate by comprising an LED light source with: a plurality of LED elements each of which is formed by connecting an LED chip to electrodes formed on a ceramic substrate; an LED-mounting substrate on which to mount the plurality of LED elements, the LED-mounting substrate having through holes therein; and a heat sink plate for releasing heat from the LED-mounting substrate, wherein a thermally conductive resin is present between the LED-mounting substrate and the heat sink plate and wherein part of the thermally conductive resin protrudes from the through holes of the LED-mounting substrate and covers the top surface of the LED-mounting substrate on which the plurality of LED elements are mounted, so that the part of the thermally conductive resin is in contact with the plurality of LED elements.
Public/Granted literature
- US20100328638A1 LED LIGHT SOURCE, ITS MANUFACTURING METHOD, AND LED-BASED PHOTOLITHOGRAPHY APPARATUS AND METHOD Public/Granted day:2010-12-30
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