Invention Grant
- Patent Title: Metrology systems and methods
- Patent Title (中): 计量系统和方法
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Application No.: US12872988Application Date: 2010-08-31
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Publication No.: US08441639B2Publication Date: 2013-05-14
- Inventor: Daniel Kandel , Vladimir Levinski , Alexander Svizher , Joel Seligson , Andrew Hill , Ohad Bachar , Amnon Manassen , Yung-Ho Alex Chuang , Ilan Sela , Moshe Markowitz , Daria Negri , Efraim Rotem
- Applicant: Daniel Kandel , Vladimir Levinski , Alexander Svizher , Joel Seligson , Andrew Hill , Ohad Bachar , Amnon Manassen , Yung-Ho Alex Chuang , Ilan Sela , Moshe Markowitz , Daria Negri , Efraim Rotem
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corp.
- Current Assignee: KLA-Tencor Corp.
- Current Assignee Address: US CA Milpitas
- Agent Ann Marie Mewherter
- Main IPC: G01J4/00
- IPC: G01J4/00 ; G01B11/14 ; G01B11/28 ; G01B11/04 ; G01B11/00
Abstract:
Various metrology systems and methods are provided.
Public/Granted literature
- US20110069312A1 METROLOGY SYSTEMS AND METHODS Public/Granted day:2011-03-24
Information query
