Invention Grant
- Patent Title: Apparatus and method for batch non-contact material characterization
- Patent Title (中): 批量非接触材料表征的装置和方法
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Application No.: US13495160Application Date: 2012-06-13
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Publication No.: US08441653B2Publication Date: 2013-05-14
- Inventor: Dong Seung Lee , Mikhail Belousov , Eric A. Armour , William E. Quinn
- Applicant: Dong Seung Lee , Mikhail Belousov , Eric A. Armour , William E. Quinn
- Applicant Address: US NY Plainview
- Assignee: Veeco Instruments Inc.
- Current Assignee: Veeco Instruments Inc.
- Current Assignee Address: US NY Plainview
- Agency: Lerner, David, Littenberg, Krumholz & Mentlik, LLP
- Main IPC: G01B11/24
- IPC: G01B11/24
Abstract:
An apparatus for performing non-contact material characterization includes a wafer carrier adapted to hold a plurality of substrates and a material characterization device, such as a device for performing photoluminescence spectroscopy. The apparatus is adapted to perform non-contact material characterization on at least a portion of the wafer carrier, including the substrates disposed thereon.
Public/Granted literature
- US20120248336A1 Apparatus and Method for Batch Non-Contact Material Characterization Public/Granted day:2012-10-04
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