Invention Grant
- Patent Title: Optical module with minimized overrun of the optical element
- Patent Title (中): 具有光学元件最小化的光学模块
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Application No.: US11901130Application Date: 2007-09-14
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Publication No.: US08441747B2Publication Date: 2013-05-14
- Inventor: Willi Heintel , Hagen Federau , Joachim Hartjes , Harald Kirchner , Bernhard Geuppert , Ulrich Bingel , Tilman Schwertner
- Applicant: Willi Heintel , Hagen Federau , Joachim Hartjes , Harald Kirchner , Bernhard Geuppert , Ulrich Bingel , Tilman Schwertner
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE102006044033 20060914
- Main IPC: G02B7/02
- IPC: G02B7/02 ; G03B27/42

Abstract:
There is provided an optical module for microlithography. The optical module includes an optical element and a retaining device for holding the optical element. The optical element has (a) a main extension plane, in which it defines a radial direction R and a circumferential direction U, and (b) a free optical diameter and an overrun in the region of its outer periphery. The retaining device contacts the optical element in the region of the overrun, and is formed and/or contacts the optical element in such a manner that the overrun ratio, calculated from the overrun related to a minimum overrun necessary for the production of the optical element, is at most 1.5.
Public/Granted literature
- US20080204689A1 Optical module with minimized overrun of the optical element Public/Granted day:2008-08-28
Information query
IPC分类:
G | 物理 |
G02 | 光学 |
G02B | 光学元件、系统或仪器 |
G02B7/00 | 光学元件的安装、调整装置或不漏光连接 |
G02B7/02 | .用于透镜 |