Invention Grant
- Patent Title: Applications of neural networks
- Patent Title (中): 神经网络的应用
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Application No.: US12032733Application Date: 2008-02-18
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Publication No.: US08442667B2Publication Date: 2013-05-14
- Inventor: Patrick D. Pannese
- Applicant: Patrick D. Pannese
- Applicant Address: US MA Chelmsford
- Assignee: Brooks Automation, Inc.
- Current Assignee: Brooks Automation, Inc.
- Current Assignee Address: US MA Chelmsford
- Agency: Perman & Green, LLP
- Agent Colin Durham
- Main IPC: G06F19/00
- IPC: G06F19/00 ; G06F17/00 ; G06E1/00 ; G06N5/00 ; G05B13/02

Abstract:
Software for controlling processes in a heterogeneous semiconductor manufacturing environment may include a wafer-centric database, a real-time scheduler using a neural network, and a graphical user interface displaying simulated operation of the system. These features may be employed alone or in combination to offer improved usability and computational efficiency for real time control and monitoring of a semiconductor manufacturing process. More generally, these techniques may be usefully employed in a variety of real time control systems, particularly systems requiring complex scheduling decisions or heterogeneous systems constructed of hardware from numerous independent vendors.
Public/Granted literature
- US20080147580A1 APPLICATIONS OF NEURAL NETWORKS Public/Granted day:2008-06-19
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