Invention Grant
- Patent Title: Auto-sequencing multi-directional inline processing apparatus
- Patent Title (中): 自动排序多向在线处理设备
-
Application No.: US12965798Application Date: 2010-12-10
-
Publication No.: US08444364B2Publication Date: 2013-05-21
- Inventor: Wendell Thomas Blonigan , Masato Toshima , Kam S. Law , David Eric Berkstresser , Steve Kleinke , Craig Lyle Stevens
- Applicant: Wendell Thomas Blonigan , Masato Toshima , Kam S. Law , David Eric Berkstresser , Steve Kleinke , Craig Lyle Stevens
- Applicant Address: US CA San Jose
- Assignee: Orbotech LT Solar, LLC.
- Current Assignee: Orbotech LT Solar, LLC.
- Current Assignee Address: US CA San Jose
- Agency: Nixon Peabody LLP
- Agent Joseph Bach, Esq.
- Main IPC: B65G53/46
- IPC: B65G53/46
Abstract:
An apparatus and method for concurrent processing of several substrates. The system employs a novel architecture which, while being linear, may autonomously sequence processing and move substrates in different directions as necessary. The system moves several substrates concurrently; however, unlike the prior art it does not utilize trays.
Public/Granted literature
- US20110142573A1 AUTO-SEQUENCING MULTI-DIRECTIONAL INLINE PROCESSING APPARATUS Public/Granted day:2011-06-16
Information query
IPC分类:
