Invention Grant
- Patent Title: Pellicle for lithography
- Patent Title (中): 光刻胶片
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Application No.: US12944194Application Date: 2010-11-11
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Publication No.: US08445165B2Publication Date: 2013-05-21
- Inventor: Yuichi Hamada
- Applicant: Yuichi Hamada
- Applicant Address: JP Tokyo
- Assignee: Shin-Etsu Chemical Co., Ltd.
- Current Assignee: Shin-Etsu Chemical Co., Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Kratz, Quintos & Hanson, LLP
- Priority: JP2009-263986 20091119
- Main IPC: G03F1/64
- IPC: G03F1/64

Abstract:
A pellicle for lithography is provided that includes a pellicle frame provided with one or more atmospheric pressure adjustment holes having an inner peripheral face with a shape that opens out in going toward the inside of the pellicle frame. There is also provided a process for producing the pellicle for lithography, the process comprising a step of forming the pellicle for lithography and a step of spray-coating a pressure-sensitive adhesive composition from inside the pellicle frame.
Public/Granted literature
- US20110117482A1 PELLICLE FOR LITHOGRAPHY Public/Granted day:2011-05-19
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