Invention Grant
- Patent Title: Thin-film solar battery module manufacturing method
- Patent Title (中): 薄膜太阳能电池模块制造方法
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Application No.: US12992125Application Date: 2009-05-12
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Publication No.: US08445315B2Publication Date: 2013-05-21
- Inventor: Hiroto Uchida , Yuko Taguchi , Masashi Ueda , Michihiro Takayama
- Applicant: Hiroto Uchida , Yuko Taguchi , Masashi Ueda , Michihiro Takayama
- Applicant Address: JP Chigasaki-shi, Kanagawa
- Assignee: Ulvac, Inc.
- Current Assignee: Ulvac, Inc.
- Current Assignee Address: JP Chigasaki-shi, Kanagawa
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2008-128178 20080515
- International Application: PCT/JP2009/058854 WO 20090512
- International Announcement: WO2009/139389 WO 20091119
- Main IPC: H01L21/00
- IPC: H01L21/00
Abstract:
The present invention relates to a thin-film solar battery module manufacturing method and a thin-film solar battery module that are capable of securing dielectric breakdown voltage characteristics of high reliability. An important aspect of the invention relates to forming isolation trenches along peripheral regions of a transparent substrate and thereafter selectively removing electrode and semi-conductor layers to arrive at the thin film solar battery module.
Public/Granted literature
- US20110114161A1 Thin-Film Solar Battery Module Manufacturing Method and Thin-Film Solar Battery Module Public/Granted day:2011-05-19
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