Invention Grant
US08445333B2 Method of forming polysilicon, thin film transistor using the polysilicon, and method of fabricating the thin film transistor 有权
使用多晶硅形成多晶硅的方法,使用该多晶硅的薄膜晶体管,以及制造该薄膜晶体管的方法

Method of forming polysilicon, thin film transistor using the polysilicon, and method of fabricating the thin film transistor
Abstract:
A method of forming polysilicon, a thin film transistor (TFT) using the polysilicon, and a method of fabricating the TFT are disclosed. The method of forming the polysilicon comprises: forming an insulating layer on a substrate; forming a first electrode and a second electrode on the insulating layer; forming at least one heater layer on the insulating layer so as to connect the first electrode and the second electrode; forming an amorphous material layer containing silicon on the heater layer(s); forming a through-hole under the heater layer(s) by etching the insulating layer; and crystallizing the amorphous material layer into a polysilicon layer by applying a voltage between the first electrode and the second electrode so as to heat the heater layer(s).
Information query
Patent Agency Ranking
0/0