Invention Grant
US08445351B2 Floating-gate nonvolatile semiconductor memory device and method of making
有权
浮栅非易失性半导体存储器件及其制造方法
- Patent Title: Floating-gate nonvolatile semiconductor memory device and method of making
- Patent Title (中): 浮栅非易失性半导体存储器件及其制造方法
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Application No.: US13255240Application Date: 2011-01-04
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Publication No.: US08445351B2Publication Date: 2013-05-21
- Inventor: Dongping Wu , Shi-Li Zhang
- Applicant: Dongping Wu , Shi-Li Zhang
- Applicant Address: CN Shanghai
- Assignee: Fudan University
- Current Assignee: Fudan University
- Current Assignee Address: CN Shanghai
- Agent Jamie J. Zheng, Esq.
- Priority: CN201010022877 20100115
- International Application: PCT/CN2011/000016 WO 20110104
- International Announcement: WO2011/085637 WO 20110721
- Main IPC: H01L21/336
- IPC: H01L21/336 ; H01L21/338 ; H01L21/8238 ; H01L21/425

Abstract:
The present invention provides a floating-gate non-volatile semiconductor memory device and a method of making the same. The floating-gate non-volatile semiconductor memory device comprises a semiconductor substrate, a source, a drain, a first insulator layer, a first polysilicon layer, a second insulator layer, a second polysilicon layer, a protective layer and sidewalls. The source and drain are disposed on the semiconductor substrate. The first insulator layer is disposed over a region of the semiconductor substrate other than regions corresponding to the source and drain. The first polysilicon layer is disposed over the first insulator layer, forming a floating gate. The second insulator layer is disposed over the first polysilicon layer. The second polysilicon layer is disposed over the second insulator layer, forming a control gate and a wordline. The sidewalls are disposed on two sides of the wordline, and the protective layer is disposed over the second polysilicon layer. A semiconductor junction at a drain region is a P-N junction, while a semiconductor junction at a source region is a metal-semiconductor junction.
Public/Granted literature
- US20120267698A1 FLOATING-GATE NONVOLATILE SEMICONDUCTOR MEMORY DEVICE AND METHOD OF MAKING Public/Granted day:2012-10-25
Information query
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