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US08445384B2 High density six transistor FinFET SRAM cell layout 失效
高密度六晶体管FinFET SRAM单元布局

High density six transistor FinFET SRAM cell layout
Abstract:
Dual orientation of finFET transistors in a static random access memory (SRAM) cell allows aggressive scaling to a minimum feature size of 15 nm and smaller using currently known masking techniques that provide good manufacturing yield. A preferred layout and embodiment features inverters formed from adjacent, parallel finFETs with a shared gate and different conductivity types developed through a double sidewall image transfer process while the preferred dimensions of the inverter finFETs and the pass transistors allow critical dimensions of all transistors to be sufficiently uniform despite the dual transistor orientation of the SRAM cell layout.
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