Invention Grant
- Patent Title: High density six transistor FinFET SRAM cell layout
- Patent Title (中): 高密度六晶体管FinFET SRAM单元布局
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Application No.: US13048224Application Date: 2011-03-15
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Publication No.: US08445384B2Publication Date: 2013-05-21
- Inventor: Abhisek Dixit
- Applicant: Abhisek Dixit
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Whitham, Curtis, Christofferson & Cook, P.C.
- Agent Joseph P. Abate
- Main IPC: H01L21/302
- IPC: H01L21/302 ; H01L21/425

Abstract:
Dual orientation of finFET transistors in a static random access memory (SRAM) cell allows aggressive scaling to a minimum feature size of 15 nm and smaller using currently known masking techniques that provide good manufacturing yield. A preferred layout and embodiment features inverters formed from adjacent, parallel finFETs with a shared gate and different conductivity types developed through a double sidewall image transfer process while the preferred dimensions of the inverter finFETs and the pass transistors allow critical dimensions of all transistors to be sufficiently uniform despite the dual transistor orientation of the SRAM cell layout.
Public/Granted literature
- US20120235240A1 HIGH DENSITY SIX TRANSISTOR FINFET SRAM CELL LAYOUT Public/Granted day:2012-09-20
Information query
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