Invention Grant
US08445592B2 Crosslinkable graft polymer non-preferentially wetted by polystyrene and polyethylene oxide
有权
不优先用聚苯乙烯和聚环氧乙烷润湿的可交联接枝聚合物
- Patent Title: Crosslinkable graft polymer non-preferentially wetted by polystyrene and polyethylene oxide
- Patent Title (中): 不优先用聚苯乙烯和聚环氧乙烷润湿的可交联接枝聚合物
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Application No.: US13324216Application Date: 2011-12-13
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Publication No.: US08445592B2Publication Date: 2013-05-21
- Inventor: Dan B. Millward
- Applicant: Dan B. Millward
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: TraskBritt
- Main IPC: C08L71/02
- IPC: C08L71/02

Abstract:
Methods for fabricating a random graft PS-r-PEO copolymer and its use as a neutral wetting layer in the fabrication of sublithographic, nanoscale arrays of elements including openings and linear microchannels utilizing self-assembling block copolymers, and films and devices formed from these methods are provided. In some embodiments, the films can be used as a template or mask to etch openings in an underlying material layer.
Public/Granted literature
- US20120082822A1 Crosslinkable Graft Polymer Non-Preferentially Wetted by Polystyrene and Polyethylene Oxide Public/Granted day:2012-04-05
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