Invention Grant
US08445592B2 Crosslinkable graft polymer non-preferentially wetted by polystyrene and polyethylene oxide 有权
不优先用聚苯乙烯和聚环氧乙烷润湿的可交联接枝聚合物

  • Patent Title: Crosslinkable graft polymer non-preferentially wetted by polystyrene and polyethylene oxide
  • Patent Title (中): 不优先用聚苯乙烯和聚环氧乙烷润湿的可交联接枝聚合物
  • Application No.: US13324216
    Application Date: 2011-12-13
  • Publication No.: US08445592B2
    Publication Date: 2013-05-21
  • Inventor: Dan B. Millward
  • Applicant: Dan B. Millward
  • Applicant Address: US ID Boise
  • Assignee: Micron Technology, Inc.
  • Current Assignee: Micron Technology, Inc.
  • Current Assignee Address: US ID Boise
  • Agency: TraskBritt
  • Main IPC: C08L71/02
  • IPC: C08L71/02
Crosslinkable graft polymer non-preferentially wetted by polystyrene and polyethylene oxide
Abstract:
Methods for fabricating a random graft PS-r-PEO copolymer and its use as a neutral wetting layer in the fabrication of sublithographic, nanoscale arrays of elements including openings and linear microchannels utilizing self-assembling block copolymers, and films and devices formed from these methods are provided. In some embodiments, the films can be used as a template or mask to etch openings in an underlying material layer.
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