Invention Grant
- Patent Title: Substrate cutting apparatus and method of cutting substrate using the same
- Patent Title (中): 基板切割装置及使用其切割基板的方法
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Application No.: US12731305Application Date: 2010-03-25
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Publication No.: US08445814B2Publication Date: 2013-05-21
- Inventor: Hyun-Chul Lee , Gyoo-Wan Han , Jong-Dae Kim , Jin-Han Park , Joon-Hyung Kim , Hyung-Sik Kim , In-Su Choi , Yong-Jin Lee
- Applicant: Hyun-Chul Lee , Gyoo-Wan Han , Jong-Dae Kim , Jin-Han Park , Joon-Hyung Kim , Hyung-Sik Kim , In-Su Choi , Yong-Jin Lee
- Applicant Address: KR Yongin, Gyeonggi-Do
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin, Gyeonggi-Do
- Agency: Lee & Morse, P.C.
- Priority: KR10-2009-0025452 20090325
- Main IPC: B23K26/00
- IPC: B23K26/00 ; B23K26/14 ; B23K26/16

Abstract:
A substrate cutting apparatus includes a stage configured to support a substrate to be cut along a virtual cutting line, a laser generator configured to emit an ultraviolet (UV)-based laser beam for cutting the substrate by removing part of the substrate along the cutting line, and a beam oscillator disposed on a beam path of the laser beam and configured to perform a beam swing on the laser beam in a direction parallel to the length direction of the cutting line by oscillating a tilt angle of the laser beam toward the cutting line.
Public/Granted literature
- US20100243627A1 SUBSTRATE CUTTING APPARATUS AND METHOD OF CUTTING SUBSTRATE USING THE SAME Public/Granted day:2010-09-30
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