Invention Grant
US08445891B2 Nitride based semiconductor device and method for manufacturing the same 有权
氮化物基半导体器件及其制造方法

Nitride based semiconductor device and method for manufacturing the same
Abstract:
Disclosed herein is a nitride based semiconductor device. There is provided a nitride based semiconductor device including: a base substrate; an epitaxial growth layer disposed on the base substrate and generating 2-dimensional electron gas (2DEG) therein; and an electrode structure disposed on the epitaxial growth layer and having an extension extending into the epitaxial growth layer, wherein the epitaxial growth layer includes a depressing part depressed thereinto from the surface of the epitaxial growth layer, and the depressing part includes: a first area in which the extension is disposed; and a second area that is an area other than the first area.
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