Invention Grant
- Patent Title: Nitride based semiconductor device and method for manufacturing the same
- Patent Title (中): 氮化物基半导体器件及其制造方法
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Application No.: US13049403Application Date: 2011-03-16
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Publication No.: US08445891B2Publication Date: 2013-05-21
- Inventor: Woochul Jeon , Kiyeol Park , Younghwan Park
- Applicant: Woochul Jeon , Kiyeol Park , Younghwan Park
- Applicant Address: KR Suwon
- Assignee: Samsung Electro-Mechanics Co., Ltd.
- Current Assignee: Samsung Electro-Mechanics Co., Ltd.
- Current Assignee Address: KR Suwon
- Agency: McDermott Will & Emery LLP
- Priority: KR10-2010-0125288 20101209
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L29/10 ; H01L29/423 ; H01L29/66 ; H01L29/778 ; H01L29/20

Abstract:
Disclosed herein is a nitride based semiconductor device. There is provided a nitride based semiconductor device including: a base substrate; an epitaxial growth layer disposed on the base substrate and generating 2-dimensional electron gas (2DEG) therein; and an electrode structure disposed on the epitaxial growth layer and having an extension extending into the epitaxial growth layer, wherein the epitaxial growth layer includes a depressing part depressed thereinto from the surface of the epitaxial growth layer, and the depressing part includes: a first area in which the extension is disposed; and a second area that is an area other than the first area.
Public/Granted literature
- US20120146052A1 NITRIDE BASED SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2012-06-14
Information query
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