Invention Grant
- Patent Title: Thin film transistor and method of manufacturing the same
- Patent Title (中): 薄膜晶体管及其制造方法
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Application No.: US12990408Application Date: 2009-04-28
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Publication No.: US08445902B2Publication Date: 2013-05-21
- Inventor: Ayumu Sato , Ryo Hayashi , Hisato Yabuta , Masafumi Sano
- Applicant: Ayumu Sato , Ryo Hayashi , Hisato Yabuta , Masafumi Sano
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Canon U.S.A., Inc. IP Division
- Priority: JP2008-121384 20080507
- International Application: PCT/JP2009/058724 WO 20090428
- International Announcement: WO2009/136645 WO 20091112
- Main IPC: H01L29/10
- IPC: H01L29/10 ; H01L29/12

Abstract:
Provided are a coplanar structure thin film transistor that allows a threshold voltage to change only a little under electric stress, and a method of manufacturing the same. The thin film transistor includes on a substrate at least: a gate electrode; a gate insulating layer; an oxide semiconductor layer including a source electrode, a drain electrode, and a channel region; a channel protection layer; and an interlayer insulating layer. The channel protection layer includes one or more layers, the layer in contact with the oxide semiconductor layer among the one or more layers being made of an insulating material containing oxygen, ends of the channel protection layer are thinner than a central part of the channel protection layer, the interlayer insulating layer contains hydrogen, and regions of the oxide semiconductor layer that are in direct contact with the interlayer insulating layer form the source electrode and the drain electrode.
Public/Granted literature
- US20110042670A1 THIN FILM TRANSISTOR AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2011-02-24
Information query
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