Invention Grant
- Patent Title: Thin film transistor having a crystalline semiconductor film including indium oxide which contains a hydrogen element and method for manufacturing same
- Patent Title (中): 具有包含含有氢元素的氧化铟的结晶半导体膜的薄膜晶体管及其制造方法
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Application No.: US13125577Application Date: 2009-10-19
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Publication No.: US08445903B2Publication Date: 2013-05-21
- Inventor: Kazuyoshi Inoue , Koki Yano , Shigekazu Tomai , Masashi Kasami , Hirokazu Kawashima , Futoshi Utsuno
- Applicant: Kazuyoshi Inoue , Koki Yano , Shigekazu Tomai , Masashi Kasami , Hirokazu Kawashima , Futoshi Utsuno
- Applicant Address: JP Tokyo
- Assignee: Idemitsu Kosan Co., Ltd.
- Current Assignee: Idemitsu Kosan Co., Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Millen, White, Zelano & Branigan, P.C.
- Priority: JP2008-273421 20081023
- International Application: PCT/JP2009/005446 WO 20091019
- International Announcement: WO2010/047077 WO 20100429
- Main IPC: H01L29/12
- IPC: H01L29/12

Abstract:
A thin film transistor including a gate electrode, a gate-insulating film, an oxide semiconductor film in contact with the gate-insulating film, and source and drain electrodes which connect to the oxide semiconductor film and are separated with a channel part therebetween, wherein the oxide semiconductor film comprises a crystalline indium oxide which includes hydrogen element, and the content of the hydrogen element contained in the oxide semiconductor film is 0.1 at % to 5 at % relative to all elements which form the oxide semiconductor film.
Public/Granted literature
- US20110198586A1 THIN FILM TRANSISTOR AND METHOD FOR MANUFACTURING SAME Public/Granted day:2011-08-18
Information query
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