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US08445903B2 Thin film transistor having a crystalline semiconductor film including indium oxide which contains a hydrogen element and method for manufacturing same 有权
具有包含含有氢元素的氧化铟的结晶半导体膜的薄膜晶体管及其制造方法

Thin film transistor having a crystalline semiconductor film including indium oxide which contains a hydrogen element and method for manufacturing same
Abstract:
A thin film transistor including a gate electrode, a gate-insulating film, an oxide semiconductor film in contact with the gate-insulating film, and source and drain electrodes which connect to the oxide semiconductor film and are separated with a channel part therebetween, wherein the oxide semiconductor film comprises a crystalline indium oxide which includes hydrogen element, and the content of the hydrogen element contained in the oxide semiconductor film is 0.1 at % to 5 at % relative to all elements which form the oxide semiconductor film.
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