Invention Grant
US08445968B2 Semiconductor device having analog transistor with improved operating and flicker noise characteristics and method of making same
有权
具有具有改善的操作和闪烁噪声特性的模拟晶体管的半导体器件及其制造方法
- Patent Title: Semiconductor device having analog transistor with improved operating and flicker noise characteristics and method of making same
- Patent Title (中): 具有具有改善的操作和闪烁噪声特性的模拟晶体管的半导体器件及其制造方法
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Application No.: US13091327Application Date: 2011-04-21
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Publication No.: US08445968B2Publication Date: 2013-05-21
- Inventor: Tetsuji Ueno , Hwa-sung Rhee , Ho Lee
- Applicant: Tetsuji Ueno , Hwa-sung Rhee , Ho Lee
- Applicant Address: KR Suwon-si, Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si, Gyeonggi-do
- Agency: Volentine & Whitt, PLLC
- Priority: KR10-2006-0045709 20060522
- Main IPC: H01L21/70
- IPC: H01L21/70

Abstract:
A semiconductor device with improved transistor operating and flicker noise characteristics includes a substrate, an analog NMOS transistor and a compressively-strained-channel analog PMOS transistor disposed on the substrate. The device also includes a first etch stop liner (ESL) and a second ESL which respectively cover the NMOS transistor and the PMOS transistor. The relative measurement of flicker noise power of the NMOS and PMOS transistors to flicker noise power of reference unstrained-channel analog NMOS and PMOS transistors at a frequency of 500 Hz is less than 1.
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