Invention Grant
- Patent Title: Carrier concentration measuring device and carrier concentration measuring method
- Patent Title (中): 载流子浓度测量装置和载流子浓度测量方法
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Application No.: US12747284Application Date: 2008-12-11
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Publication No.: US08446576B2Publication Date: 2013-05-21
- Inventor: Hiromasa Ito , Seigo Ohno , Akihide Hamano
- Applicant: Hiromasa Ito , Seigo Ohno , Akihide Hamano
- Applicant Address: JP Saitama JP Tokyo
- Assignee: Riken,Furukawa Co., Ltd.
- Current Assignee: Riken,Furukawa Co., Ltd.
- Current Assignee Address: JP Saitama JP Tokyo
- Agency: Rankin, Hill & Clark LLP
- Priority: JP2007-323395 20071214
- International Application: PCT/JP2008/003715 WO 20081211
- International Announcement: WO2009/078149 WO 20090625
- Main IPC: G01J3/00
- IPC: G01J3/00

Abstract:
A nondestructive carrier concentration measuring device (100) includes: a storage unit (101) that stores a correlation between the reflectance of an inorganic compound semiconductor against terahertz light and a carrier concentration; a light radiation unit (103) that irradiates the terahertz light (105) to the inorganic compound semiconductor as a sample; a detection unit (109) that detects reflected light (108) of the inorganic compound semiconductor against the irradiated terahertz light (105); a reflectance calculation unit (111) that compares the irradiated terahertz light (105) with the reflected light (108) and calculates an actual measurement value of the reflectance of the inorganic compound semiconductor; and a read unit (113) that refers to the stored correlation and reads the carrier concentration of the sample corresponding to the actual measurement value of the reflectance.
Public/Granted literature
- US20100271618A1 CARRIER CONCENTRATION MEASURING DEVICE AND CARRIER CONCENTRATION MEASURING METHOD Public/Granted day:2010-10-28
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