Invention Grant
- Patent Title: Extendable electrode for gas discharge laser
- Patent Title (中): 气体放电激光可扩展电极
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Application No.: US12945719Application Date: 2010-11-12
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Publication No.: US08446928B2Publication Date: 2013-05-21
- Inventor: Richard L. Sandstrom , Tae (Mark) H. Chung , Richard C. Ujazdowski
- Applicant: Richard L. Sandstrom , Tae (Mark) H. Chung , Richard C. Ujazdowski
- Applicant Address: US CA San Diego
- Assignee: Cymer, Inc.
- Current Assignee: Cymer, Inc.
- Current Assignee Address: US CA San Diego
- Agency: Martine Penilla Group, LLP
- Main IPC: H01S3/097
- IPC: H01S3/097

Abstract:
A movable electrode assembly for use in laser system includes a first electrode, a second electrode arranged opposite from the first electrode, the second electrode being spaced apart from the first electrode by a discharge gap and a discharge gap adjuster interfaced with at least one of the second electrode or the first electrode, the discharge gap adjuster configured to adjust the discharge gap. A movable electrode assembly for integration into a housing of a laser system includes a first electrode having a discharge surface, a second electrode having a discharge surface, such that the discharge surface of the first electrode and the discharge surface of the second electrode face each other in a spaced apart setting that defines a desired discharge gap, and a mechanism for moveably adjusting the spaced apart setting toward the desired discharge gap. A method of adjusting a discharge gap is also disclosed.
Public/Granted literature
- US20110058580A1 EXTENDABLE ELECTRODE FOR GAS DISCHARGE LASER Public/Granted day:2011-03-10
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