Invention Grant
- Patent Title: Waveguide coupling device with properties of forward and backward coupling as well as manufacturing method thereof
- Patent Title (中): 具有前后耦合性能的波导耦合装置及其制造方法
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Application No.: US13207305Application Date: 2011-08-10
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Publication No.: US08447152B2Publication Date: 2013-05-21
- Inventor: Ming-Chang Lee , Kai-Ning Ku
- Applicant: Ming-Chang Lee , Kai-Ning Ku
- Applicant Address: TW Hsinchu
- Assignee: National Tsing Hua University
- Current Assignee: National Tsing Hua University
- Current Assignee Address: TW Hsinchu
- Priority: TW99141766A 20101201
- Main IPC: G02B6/26
- IPC: G02B6/26 ; G02B6/42 ; G02B6/12 ; H01L21/02

Abstract:
The present invention relates to a waveguide coupling device with properties of forward coupling and backward coupling as well as a manufacturing method thereof, the waveguide coupling device comprises: a substrate, at least one inverted taper coupling structure, an intermediate layer, and at least one three-dimensional taper coupling structure. Wherein one end of the three-dimensional taper coupling structure is adopted for connecting to an external optical fiber, so as to couple the optical wave propagating in the optical fiber; Moreover, by way of the specific coupling sequence of (three-dimensional taper coupling structure)-(intermediate layer)-(inverted taper coupling structure), the optical wave may be efficiently coupled into, be confined in, and ultimately propagates in the inverted taper coupling structure connecting to waveguide devices. In addition, through the manufacturing method, the waveguide coupling device with properties of forward coupling and backward coupling can be massively fabricated by the present semiconductor process with low cost.
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