Invention Grant
US08450912B2 Actuator element, method of driving actuator element, method of manufacturing actuator element, device inspection method and MEMS switch
有权
驱动元件,驱动元件驱动方法,制动元件制造方法,器件检测方法及MEMS开关
- Patent Title: Actuator element, method of driving actuator element, method of manufacturing actuator element, device inspection method and MEMS switch
- Patent Title (中): 驱动元件,驱动元件驱动方法,制动元件制造方法,器件检测方法及MEMS开关
-
Application No.: US12974121Application Date: 2010-12-21
-
Publication No.: US08450912B2Publication Date: 2013-05-28
- Inventor: Takamichi Fujii
- Applicant: Takamichi Fujii
- Applicant Address: JP Tokyo
- Assignee: FUJIFILM Corporation
- Current Assignee: FUJIFILM Corporation
- Current Assignee Address: JP Tokyo
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Priority: JP2009-297877 20091228
- Main IPC: H01L41/08
- IPC: H01L41/08

Abstract:
An actuator element includes: a piezoelectric body; a pair of electrodes mutually opposing to each other via the piezoelectric body; a diaphragm to which the piezoelectric body sandwiched between the pair of electrodes is bonded; and a base substrate arranged to oppose a movable part including the piezoelectric body and the diaphragm, the movable part being displaced in a direction toward the base substrate by application of a drive voltage to the pair of electrodes, wherein polarization (Pr)-electric field (E) hysteresis characteristics of the piezoelectric body are biased with respect to an electric field, and by application of a voltage in an opposite direction to the drive voltage, to the pair of electrodes, the movable part is displaced in a direction away from the base substrate.
Public/Granted literature
Information query
IPC分类: