Invention Grant
US08450912B2 Actuator element, method of driving actuator element, method of manufacturing actuator element, device inspection method and MEMS switch 有权
驱动元件,驱动元件驱动方法,制动元件制造方法,器件检测方法及MEMS开关

  • Patent Title: Actuator element, method of driving actuator element, method of manufacturing actuator element, device inspection method and MEMS switch
  • Patent Title (中): 驱动元件,驱动元件驱动方法,制动元件制造方法,器件检测方法及MEMS开关
  • Application No.: US12974121
    Application Date: 2010-12-21
  • Publication No.: US08450912B2
    Publication Date: 2013-05-28
  • Inventor: Takamichi Fujii
  • Applicant: Takamichi Fujii
  • Applicant Address: JP Tokyo
  • Assignee: FUJIFILM Corporation
  • Current Assignee: FUJIFILM Corporation
  • Current Assignee Address: JP Tokyo
  • Agency: Birch, Stewart, Kolasch & Birch, LLP
  • Priority: JP2009-297877 20091228
  • Main IPC: H01L41/08
  • IPC: H01L41/08
Actuator element, method of driving actuator element, method of manufacturing actuator element, device inspection method and MEMS switch
Abstract:
An actuator element includes: a piezoelectric body; a pair of electrodes mutually opposing to each other via the piezoelectric body; a diaphragm to which the piezoelectric body sandwiched between the pair of electrodes is bonded; and a base substrate arranged to oppose a movable part including the piezoelectric body and the diaphragm, the movable part being displaced in a direction toward the base substrate by application of a drive voltage to the pair of electrodes, wherein polarization (Pr)-electric field (E) hysteresis characteristics of the piezoelectric body are biased with respect to an electric field, and by application of a voltage in an opposite direction to the drive voltage, to the pair of electrodes, the movable part is displaced in a direction away from the base substrate.
Information query
Patent Agency Ranking
0/0