Invention Grant
- Patent Title: MEMS switches with reduced switching voltage and methods of manufacture
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Application No.: US12107118Application Date: 2008-04-22
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Publication No.: US08451077B2Publication Date: 2013-05-28
- Inventor: Stephen E. Luce , Anthony K. Stamper
- Applicant: Stephen E. Luce , Anthony K. Stamper
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Roberts Mlotkowski Safran & Cole, P.C.
- Agent Anthony Canale
- Main IPC: H01H51/22
- IPC: H01H51/22
Abstract:
MEMS switches and methods of manufacturing MEMS switches is provided. The MEMS switch having at least two cantilevered electrodes having ends which overlap and which are structured and operable to contact one another upon an application of a voltage by at least one fixed electrode.
Public/Granted literature
- US20090260961A1 Mems Switches With Reduced Switching Voltage and Methods of Manufacture Public/Granted day:2009-10-22
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