Invention Grant
US08451693B2 Micromachined ultrasonic transducer having compliant post structure
有权
具有顺应柱结构的微加工超声换能器
- Patent Title: Micromachined ultrasonic transducer having compliant post structure
- Patent Title (中): 具有顺应柱结构的微加工超声换能器
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Application No.: US12806763Application Date: 2010-08-20
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Publication No.: US08451693B2Publication Date: 2013-05-28
- Inventor: Amin Nikoozadeh , Butrus T. Khuri-Yakub
- Applicant: Amin Nikoozadeh , Butrus T. Khuri-Yakub
- Applicant Address: US CA Palo Alto
- Assignee: The Board of Trustees of the Leland Stanford Junior University
- Current Assignee: The Board of Trustees of the Leland Stanford Junior University
- Current Assignee Address: US CA Palo Alto
- Agency: Lumen Patent Firm
- Main IPC: H04R19/00
- IPC: H04R19/00 ; B06B1/02

Abstract:
A compression post capacitive micromachined ultrasonic transducer (CMUT) is provided. The compression post CMUT includes a first electrode, a top conductive layer having a pattern of post holes, a moveable mass that includes the first electrode. The compression post CMUT further includes an operating gap disposed between the top surface of the top conductive layer and a bottom surface of the moveable mass, a pattern of compression posts, where a proximal end the compression post is connected perpendicularly to a bottom surface of the moveable mass, where the pattern of compression posts span through the pattern of post holes. The top conductive layer includes the second electrode that is electronically insulated from the first electrode, where the pattern of compression posts compress to provide a restoring force in a direction that is normal to the bottom surface of the moveable mass.
Public/Granted literature
- US20110050033A1 Micromachined ultrasonic transducer having compliant post structure Public/Granted day:2011-03-03
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