Invention Grant
US08453329B2 Method of fabricating inkjet printhead having low-loss contact for thermal actuators
有权
制造用于热致动器的具有低损耗接触的喷墨打印头的方法
- Patent Title: Method of fabricating inkjet printhead having low-loss contact for thermal actuators
- Patent Title (中): 制造用于热致动器的具有低损耗接触的喷墨打印头的方法
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Application No.: US12909754Application Date: 2010-10-21
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Publication No.: US08453329B2Publication Date: 2013-06-04
- Inventor: Angus John North , Richard Dimagiba , Witold Roman Wiszniewski
- Applicant: Angus John North , Richard Dimagiba , Witold Roman Wiszniewski
- Applicant Address: IE Dublin
- Assignee: Zamtec Ltd
- Current Assignee: Zamtec Ltd
- Current Assignee Address: IE Dublin
- Agency: Cooley LLP
- Main IPC: B21D53/76
- IPC: B21D53/76 ; B23P17/00
Abstract:
A method of fabricating an inkjet printhead is provided in which a supporting substrate is provided, a conductive layer is deposited and patterned on one side of the supporting substrate, an insulating layer is deposited on the conductive layer, holes are etched through the insulating layer to the conductive layer, metal is deposited in the holes to form metallic vias, an outer surface of the insulating layer and one end of each of the metallic vias are planarized, and a layer of heater material is deposited and patterned on the outer surface to form a heater with a resistive element extending between a pair of contacts. The metallic vias electrically connect the contacts to the conductive layer.
Public/Granted literature
- US20110094103A1 METHOD OF FABRICATING INKJET PRINTHED HAVING LOW-LOSS CONTACT FOR THERMAL ACTUATORS Public/Granted day:2011-04-28
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