Invention Grant
- Patent Title: Trace gas sensing apparatus and methods for leak detection
- Patent Title (中): 痕量气体检测装置和泄漏检测方法
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Application No.: US12917880Application Date: 2010-11-02
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Publication No.: US08453493B2Publication Date: 2013-06-04
- Inventor: David Wall , J. Daniel Geist , Stephen M. Elliott
- Applicant: David Wall , J. Daniel Geist , Stephen M. Elliott
- Applicant Address: US CA Santa Clara
- Assignee: Agilent Technologies, Inc.
- Current Assignee: Agilent Technologies, Inc.
- Current Assignee Address: US CA Santa Clara
- Main IPC: G01N7/00
- IPC: G01N7/00

Abstract:
A trace gas sensing apparatus includes a cathode, an anode, a vacuum enclosure, and a membrane. The anode coaxially surrounds the cathode, wherein the cathode and the anode define an annular ionization chamber. The vacuum enclosure surrounds the cathode and the anode and includes a gas inlet fluidly communicating with the ionization chamber. The membrane is coupled to the gas inlet in a sealed manner and is permselective to trace gas. The apparatus may further include circuitry for applying a negative voltage potential to the cathode and for measuring an ion current signal generated by the cathode, and a magnet assembly for generating a magnetic field in the ionization chamber. The cathode may include an elongated member located along a longitudinal axis, and first and second end plates orthogonal to the longitudinal axis.
Public/Granted literature
- US20120103837A1 TRACE GAS SENSING APPARATUS AND METHODS FOR LEAK DETECTION Public/Granted day:2012-05-03
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