Invention Grant
US08453503B2 Vibrating reed, vibrator, physical quantity sensor, and electronic apparatus
有权
振动簧片,振动器,物理量传感器和电子设备
- Patent Title: Vibrating reed, vibrator, physical quantity sensor, and electronic apparatus
- Patent Title (中): 振动簧片,振动器,物理量传感器和电子设备
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Application No.: US12964016Application Date: 2010-12-09
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Publication No.: US08453503B2Publication Date: 2013-06-04
- Inventor: Masahiro Oshio
- Applicant: Masahiro Oshio
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2009-284875 20091216; JP2010-226379 20101006
- Main IPC: G01C19/56
- IPC: G01C19/56

Abstract:
A resonator element includes: drive beams including a first beam and a second beam that vibrate in torsional vibration modes and are elongated side by side in a first direction; support parts that couple one ends and the other ends of the first beam and the second beam; and detection arms elongated from the respective first beam and second beam in a second direction orthogonal to the first direction in a plan view, wherein, in a drive mode, the first beam and the second beam torsionally vibrate in opposite directions to each other, the respective detection arms vibrate in a normal direction of a plane containing the first direction and the second direction, and the detection arm elongated from the first beam and the detection arm elongated from the second beam vibrate in the same direction as each other.
Public/Granted literature
- US20110138911A1 VIBRATING REED, VIBRATOR, PHYSICAL QUANTITY SENSOR, AND ELECTRONIC APPARATUS Public/Granted day:2011-06-16
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