Invention Grant
US08453842B2 Semiconductor wafer container 有权
半导体晶圆容器

  • Patent Title: Semiconductor wafer container
  • Patent Title (中): 半导体晶圆容器
  • Application No.: US13266029
    Application Date: 2009-05-13
  • Publication No.: US08453842B2
    Publication Date: 2013-06-04
  • Inventor: Kazuya Inoue
  • Applicant: Kazuya Inoue
  • Applicant Address: JP Tokyo
  • Assignee: Miraial Co., Ltd.
  • Current Assignee: Miraial Co., Ltd.
  • Current Assignee Address: JP Tokyo
  • Agency: Greenblum & Bernstein P.L.C.
  • International Application: PCT/JP2009/002073 WO 20090513
  • International Announcement: WO2010/131291 WO 20101118
  • Main IPC: B65D85/86
  • IPC: B65D85/86
Semiconductor wafer container
Abstract:
Wafer protecting grooves (10) are provided on an innermost wall (1b) of a container body (1). The wafer protecting grooves have a cross-sectional configuration in the shape of undulations having bottoms (10b), which are most distant from an opening (1a), at respective positions facing the outer edges of semiconductor wafers (W), and having an opening width wider than the thickness of each semiconductor wafer (W). In a normal state, an imaginary line (Q) connecting together the tops of the undulations is inward of or at the same position as the outer edges of the semiconductor wafers (W) facing the imaginary line. Thus, it is possible to obtain superior impact resistance that makes the semiconductor wafers (W) in the container body (1) unlikely to be damaged even when a large impact is applied thereto by a fall or other handling errors.
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