Invention Grant
US08454230B2 Method and system for indirect determination of local irradiance in an optical system
有权
用于间接确定光学系统中局部辐照度的方法和系统
- Patent Title: Method and system for indirect determination of local irradiance in an optical system
- Patent Title (中): 用于间接确定光学系统中局部辐照度的方法和系统
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Application No.: US12706422Application Date: 2010-02-16
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Publication No.: US08454230B2Publication Date: 2013-06-04
- Inventor: Frank Melzer , Axel Scholz
- Applicant: Frank Melzer , Axel Scholz
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE102005004460 20050201
- Main IPC: G01K7/00
- IPC: G01K7/00 ; G01J5/00
Abstract:
The invention concerns a method for the indirect determination of local irradiance in an optical system; wherein the optical system comprises optical elements between which an illuminated beam path is formed and a measurement object which absorbs the radiation in the beam path at least partially is positioned in a partial region of the beam path selected for the locally-resolved determination of the irradiance and the temperature distribution of at least one part of the measurement object is determined by means of a temperature detector.
Public/Granted literature
- US20100141917A1 METHOD AND SYSTEM FOR INDIRECT DETERMINATION OF LOCAL IRRADIANCE IN AN OPTICAL SYSTEM Public/Granted day:2010-06-10
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