Invention Grant
- Patent Title: Piezoelectric micropump
- Patent Title (中): 压电微型泵
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Application No.: US12234858Application Date: 2008-09-22
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Publication No.: US08454327B2Publication Date: 2013-06-04
- Inventor: Atsuhiko Hirata , Gaku Kamitani
- Applicant: Atsuhiko Hirata , Gaku Kamitani
- Applicant Address: JP Kyoto
- Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee Address: JP Kyoto
- Agency: Keating & Bennett, LLP
- Priority: JP2006-079424 20060322
- Main IPC: F04B17/00
- IPC: F04B17/00 ; F04B45/047 ; F04B43/04

Abstract:
A piezoelectric micropump in which a pump chamber is isolated by a diaphragm. A piezoelectric element is disposed on a back surface of the diaphragm, and the diaphragm is deformed by bending deformation of the piezoelectric element to change the volume of the pump chamber and transport fluid in the pump chamber. A support member for supporting a back surface of the piezoelectric element is provided so that the support member inhibits bending of a peripheral portion of the diaphragm in a reverse direction. The support member thus prevents the piezoelectric element from being floated. Accordingly, the displacement of the piezoelectric element can be reliably transmitted as the change in volume of the pump chamber, thereby enhancing the fluid transportation performance.
Public/Granted literature
- US20090010779A1 Piezoelectric Micropump Public/Granted day:2009-01-08
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