Invention Grant
- Patent Title: Load cup substrate sensing
- Patent Title (中): 负载杯底座感应
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Application No.: US12621908Application Date: 2009-11-19
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Publication No.: US08454408B2Publication Date: 2013-06-04
- Inventor: David James Lischka , Thomas Lawrence Terry
- Applicant: David James Lischka , Thomas Lawrence Terry
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson & Sheridan, LLP
- Main IPC: B24B1/00
- IPC: B24B1/00

Abstract:
Embodiments of the present invention generally provide a load cup used in the transfer of substrates in a chemical mechanical polishing system. The load cup includes an improved substrate edge sensing mechanism to ensure a substrate is present and correctly positioned in the load cup for transfer to a polishing head. In one embodiment, a lever actuated edge sensing mechanism is provided. In one embodiment, the edge of a substrate contacts a lever, which contacts a sensor to detect that the substrate is present and correctly positioned for exchange with a polishing head. Embodiments of the present invention provide reliable detection, while reducing contact with the feature side of the substrate during substrate transfer.
Public/Granted literature
- US20100130102A1 LOAD CUP SUBSTRATE SENSING Public/Granted day:2010-05-27
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