Invention Grant
- Patent Title: Multi-chamber carrier head with a textured membrane
- Patent Title (中): 具有纹理膜的多腔载体头
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Application No.: US11614940Application Date: 2006-12-21
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Publication No.: US08454413B2Publication Date: 2013-06-04
- Inventor: Jeonghoon Oh , Tsz-Sin Siu , Hung Chih Chen , Andrew J. Nagengast , Steven M. Zuniga , Thomas B. Brezoczky
- Applicant: Jeonghoon Oh , Tsz-Sin Siu , Hung Chih Chen , Andrew J. Nagengast , Steven M. Zuniga , Thomas B. Brezoczky
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Fish & Richardson P.C.
- Main IPC: B24B41/06
- IPC: B24B41/06
Abstract:
A flexible membrane for use in a carrier head has a generally circular main portion with a lower surface, an annular outer portion for connection to a base assembly, and an annular flap extending from the main portion on a side opposite the lower surface for connection to the base assembly. At least one surface of the flap has a surface texture to prevent adhesion.
Public/Granted literature
- US20070202785A1 MULTI-CHAMBER CARRIER HEAD WITH A TEXTURED MEMBRANE Public/Granted day:2007-08-30
Information query
