Invention Grant
- Patent Title: Plating bath and method
- Patent Title (中): 电镀浴和方法
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Application No.: US13280135Application Date: 2011-10-24
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Publication No.: US08454815B2Publication Date: 2013-06-04
- Inventor: Zuhra I. Niazimbetova , Maria Anna Rzeznik
- Applicant: Zuhra I. Niazimbetova , Maria Anna Rzeznik
- Applicant Address: US MA Marlborough
- Assignee: Rohm and Haas Electronics Materials LLC
- Current Assignee: Rohm and Haas Electronics Materials LLC
- Current Assignee Address: US MA Marlborough
- Agent S. Matthew Cairns
- Main IPC: C08G59/14
- IPC: C08G59/14 ; C09K3/00 ; C23C18/38 ; C25D3/38

Abstract:
Copper plating baths containing a leveling agent that is a reaction product of one or more of certain pyridine compounds with one or more epoxide-containing compounds, that deposit copper on the surface of a conductive layer are provided. Such plating baths deposit a copper layer that is substantially planar on a substrate surface across a range of electrolyte concentrations. Methods of depositing copper layers using such copper plating baths are also disclosed.
Public/Granted literature
- US20130098770A1 PLATING BATH AND METHOD Public/Granted day:2013-04-25
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