Invention Grant
- Patent Title: Stamper and stamper evaluation method
- Patent Title (中): 压模和压模评估方法
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Application No.: US12571682Application Date: 2009-10-01
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Publication No.: US08454869B2Publication Date: 2013-06-04
- Inventor: Kazuyo Umezawa , Seiji Morita , Masatoshi Sakurai
- Applicant: Kazuyo Umezawa , Seiji Morita , Masatoshi Sakurai
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Knobbe Martens Olson & Bear LLP
- Priority: JP2009-013469 20090123
- Main IPC: B29C45/76
- IPC: B29C45/76
Abstract:
According to one embodiment, this invention determines whether a maximum value Hmax and minimum value Hmin of an HF signal obtained when a data recording portion is irradiated with a laser having a wavelength of 450 nm or less and an NA of 0.6 or more meet (Hmax−Hmin)/Hmax
Public/Granted literature
- US20100188952A1 STAMPER AND STAMPER EVALUATION METHOD Public/Granted day:2010-07-29
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