Invention Grant
US08454933B2 Polycrystalline magnesium oxide (MgO) sintered body and MgO sputtering target
有权
多晶氧化镁(MgO)烧结体和MgO溅射靶
- Patent Title: Polycrystalline magnesium oxide (MgO) sintered body and MgO sputtering target
- Patent Title (中): 多晶氧化镁(MgO)烧结体和MgO溅射靶
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Application No.: US12811541Application Date: 2009-01-27
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Publication No.: US08454933B2Publication Date: 2013-06-04
- Inventor: Mitsuyoshi Nagano , Masanobu Takasu , Yo Arita , Satoru Sano
- Applicant: Mitsuyoshi Nagano , Masanobu Takasu , Yo Arita , Satoru Sano
- Applicant Address: JP Fukuoka JP Yamaguchi
- Assignee: Nippon Tungsten Co., Ltd.,Ube Material Industries, Ltd.
- Current Assignee: Nippon Tungsten Co., Ltd.,Ube Material Industries, Ltd.
- Current Assignee Address: JP Fukuoka JP Yamaguchi
- Agency: Fleit Gibbons Gutman Bongini Bianco
- Agent Marty Fleit; Paul D. Bianco
- Priority: JP2008-016246 20080128
- International Application: PCT/JP2009/051259 WO 20090127
- International Announcement: WO2009/096384 WO 20090806
- Main IPC: C01B13/14
- IPC: C01B13/14 ; C01F5/02 ; C01F5/14 ; C01F11/02 ; B28B1/00 ; B28B3/00 ; B28B5/00 ; C04B33/32 ; C04B33/36 ; C04B35/64 ; C23C14/00 ; C25B11/00 ; C25B13/00 ; C22C1/04 ; B22F3/15

Abstract:
The invention provides a polycrystal magnesium oxide (MgO) sintered body which is capable of having a sintered density close to a theoretical density thereof. The MgO sintered body exhibits excellent mechanical properties and heat conductivity, while reducing contamination of an atmosphere due to gas generation. The invention also provides a production method for the sintered body. The polycrystal MgO sintered body has a unique crystalline anisotropy in which (111) faces are oriented along a surface applied with a uniaxial pressure at a high rate. The polycrystalline MgO sintered body is obtained by a method which includes the steps of: sintering an MgO raw material powder, having a particle size of 1 μm or less, under a uniaxial pressure and then subjecting the sintered powder to a heat treatment under an atmosphere containing 0.05 volume % or more of oxygen, at a temperature of 1273 K or more for 1 minute or more.
Public/Granted literature
- US20100294657A1 POLYCRYSTALLINE MgO SINTERED BODY, PRODUCTION METHOD THEREFOR, AND MgO SPUTTERING TARGET Public/Granted day:2010-11-25
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