Invention Grant
- Patent Title: Slit coater having apparatus for supplying a coater solution
- Patent Title (中): 狭缝涂布机具有用于提供涂布机溶液的装置
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Application No.: US12243202Application Date: 2008-10-01
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Publication No.: US08455040B2Publication Date: 2013-06-04
- Inventor: O Jun Kwon , Kang Il Cho
- Applicant: O Jun Kwon , Kang Il Cho
- Applicant Address: KR Seoul
- Assignee: LG Display Co., Ltd.
- Current Assignee: LG Display Co., Ltd.
- Current Assignee Address: KR Seoul
- Agency: Brinks Hofer Gilson & Lione
- Priority: KR2004/114395 20041228
- Main IPC: B05D5/06
- IPC: B05D5/06 ; B05D1/02

Abstract:
A slit coater including an apparatus for supplying coating solution by a coating method using a slit nozzle, which is configured to minimize contamination of coating solution, utilizing a filtering function, and supplying a controlled amount of photosensitive solution to a slit nozzle. The slit coater further includes a table on which an object to be processed is mounted, a slit nozzle unit that applies coating solution onto a surface of the object to be processed, and a coating solution supply apparatus including a storage tank that stores the coating solution, a pump that supplies the coating solution stored in the storage tank to the slit nozzle unit, and a buffer tank that is in fluid communication with the pump and the storage tank.
Public/Granted literature
- US20090022880A1 SLIT COATER HAVING APPARATUS FOR SUPPLYING A COATER SOLUTION Public/Granted day:2009-01-22
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