Invention Grant
- Patent Title: Method of producing gas barrier layer, gas barrier film for solar batteries and gas barrier film for displays
- Patent Title (中): 制造阻气层的方法，太阳能电池用阻气膜和显示器用阻气膜
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Application No.: US12725577Application Date: 2010-03-17
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Publication No.: US08455059B2Publication Date: 2013-06-04
- Inventor: Toshiya Takahashi , Kouji Tonohara , Shinsuke Takahashi
- Applicant: Toshiya Takahashi , Kouji Tonohara , Shinsuke Takahashi
- Applicant Address: JP Tokyo
- Assignee: Fujifilm Corporation
- Current Assignee: Fujifilm Corporation
- Current Assignee Address: JP Tokyo
- Agency: Young & Thompson
- Priority: JP2009-064446 20090317
- Main IPC: H05H1/24
- IPC: H05H1/24
Abstract:
A method according to the invention comprises: starting plasma discharge for forming the gas barrier layer in a film deposition chamber; and producing the gas barrier layer by using a plasma after a first predetermined period of time has elapsed from a start of the plasma discharge.
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