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US08455279B2 Surface gratings on VCSELS for polarization pinning 有权
VCSELS上的表面光栅用于极化锁定

Surface gratings on VCSELS for polarization pinning
Abstract:
Methods for manufacturing a polarization pinned vertical cavity surface emitting laser (VCSEL). Steps include growing a lower mirror on a substrate; growing an active region on the lower mirror; growing an upper mirror on the active region; depositing a grating layer on the upper mirror; and etching a grating into the grating layer.
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