Invention Grant
- Patent Title: Surface gratings on VCSELS for polarization pinning
- Patent Title (中): VCSELS上的表面光栅用于极化锁定
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Application No.: US13210306Application Date: 2011-08-15
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Publication No.: US08455279B2Publication Date: 2013-06-04
- Inventor: Ralph H. Johnson , James K. Guenter
- Applicant: Ralph H. Johnson , James K. Guenter
- Applicant Address: US CA Sunnyvale
- Assignee: Finisar Corporation
- Current Assignee: Finisar Corporation
- Current Assignee Address: US CA Sunnyvale
- Agency: Maschoff Brennan
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
Methods for manufacturing a polarization pinned vertical cavity surface emitting laser (VCSEL). Steps include growing a lower mirror on a substrate; growing an active region on the lower mirror; growing an upper mirror on the active region; depositing a grating layer on the upper mirror; and etching a grating into the grating layer.
Public/Granted literature
- US20110306156A1 SURFACE GRATINGS ON VCSELS FOR POLARIZATION PINNING Public/Granted day:2011-12-15
Information query
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