Invention Grant
US08455284B2 Group III nitride nanorod light emitting device and method of manufacturing thereof
有权
III族氮化物纳米棒发光器件及其制造方法
- Patent Title: Group III nitride nanorod light emitting device and method of manufacturing thereof
- Patent Title (中): III族氮化物纳米棒发光器件及其制造方法
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Application No.: US13231415Application Date: 2011-09-13
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Publication No.: US08455284B2Publication Date: 2013-06-04
- Inventor: Han Kyu Seong , Hun Jae Chung , Jung Ja Yang , Cheol Soo Sone
- Applicant: Han Kyu Seong , Hun Jae Chung , Jung Ja Yang , Cheol Soo Sone
- Applicant Address: KR Suwon-Si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-Si
- Agency: McDermott Will & Emery LLP
- Priority: KR10-2010-0090115 20100914
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A group III nitride nanorod light emitting device and a method of manufacturing thereof. The method includes preparing a substrate, forming an insulating film including one or more openings exposing parts of the substrate on the substrate, growing first conductive group III nitride nanorod seed layers on the substrate exposed through the openings by supplying a group III source gas and a nitrogen (N) source gas thereto, growing first conductive group III nitride nanorods on the first conductive group III nitride nanorod seed layers by supplying the group III source gas and an impurity source gas in a pulse mode and continuously supplying the N source gas, forming an active layer on a surface of each of the first conductive group III nitride nanorods, and forming a second conductive nitride semiconductor layer on the active layer.
Public/Granted literature
- US20120068153A1 GROUP III NITRIDE NANOROD LIGHT EMITTING DEVICE AND METHOD OF MANUFACTURING THEREOF Public/Granted day:2012-03-22
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