Invention Grant
- Patent Title: Low frequency CMUT with thick oxide
- Patent Title (中): 低频CMUT与厚氧化物
-
Application No.: US13309853Application Date: 2011-12-02
-
Publication No.: US08455289B1Publication Date: 2013-06-04
- Inventor: Steven Adler , Peter Johnson , Ira Oaktree Wygant
- Applicant: Steven Adler , Peter Johnson , Ira Oaktree Wygant
- Applicant Address: US TX Dallas
- Assignee: Texas Instruments Incorporated
- Current Assignee: Texas Instruments Incorporated
- Current Assignee Address: US TX Dallas
- Agent Eugene C. Conser; Wade J. Brady, III; Frederick J. Telecky, Jr.
- Main IPC: H01L21/00
- IPC: H01L21/00
Abstract:
A capacitive micromachined ultrasonic transducer (CMUT), which has a conductive structure that can vibrate over a cavity, utilizes a thick oxide layer to substantially increase the volume of the cavity which, in turn, allows the CMUT to receive and transmit low frequency ultrasonic waves. In addition, the CMUT can include a back side bond pad structure that eliminates the need for and cost of one patterned photoresist layer.
Public/Granted literature
- US20130140704A1 Low Frequency CMUT with Thick Oxide Public/Granted day:2013-06-06
Information query
IPC分类:
