Invention Grant
US08455319B2 Vertical transistor for random-access memory and manufacturing method thereof
有权
用于随机存取存储器的垂直晶体管及其制造方法
- Patent Title: Vertical transistor for random-access memory and manufacturing method thereof
- Patent Title (中): 用于随机存取存储器的垂直晶体管及其制造方法
-
Application No.: US13039523Application Date: 2011-03-03
-
Publication No.: US08455319B2Publication Date: 2013-06-04
- Inventor: Tzung Han Lee , Chung-Yuan Lee , Hsien-Wen Liu
- Applicant: Tzung Han Lee , Chung-Yuan Lee , Hsien-Wen Liu
- Applicant Address: TW Taoyuan County
- Assignee: Inotera Memories, Inc.
- Current Assignee: Inotera Memories, Inc.
- Current Assignee Address: TW Taoyuan County
- Agency: Rosenberg, Klein & Lee
- Priority: TW100103946A 20110201
- Main IPC: H01L21/336
- IPC: H01L21/336 ; H01L29/76

Abstract:
A manufacturing method for a vertical transistor of random-access memory, having the steps of: defining an active region on a semiconductor substrate; forming a shallow trench isolation structure outside of the active region; etching the active region and forming a gate dielectric layer and a positioning gate thereon, forming a word line perpendicular to the positioning gate; forming spacing layers on the outer surfaces of the word line; implanting ions to the formed structure in forming an n-type and a p-type region on opposite sides of the word line with the active region; forming an n-type and a p-type floating body respectively on the n-type and p-type region; forming a source line perpendicular to the word line and connecting to the n-type floating body; forming a bit line perpendicular to the source line and connecting to the p-type floating body. Hence, a vertical transistor with steady threshold voltage is achieved.
Public/Granted literature
- US20120193706A1 VERTICAL TRANSISTOR FOR RANDOM-ACCESS MEMORY AND MANUFACTURING METHOD THEREOF Public/Granted day:2012-08-02
Information query
IPC分类: