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US08455329B2 Phase change memory device capable of increasing sensing margin and method for manufacturing the same 有权
能够增加感测裕度的相变存储装置及其制造方法

  • Patent Title: Phase change memory device capable of increasing sensing margin and method for manufacturing the same
  • Patent Title (中): 能够增加感测裕度的相变存储装置及其制造方法
  • Application No.: US13047154
    Application Date: 2011-03-14
  • Publication No.: US08455329B2
    Publication Date: 2013-06-04
  • Inventor: Heon Yong Chang
  • Applicant: Heon Yong Chang
  • Applicant Address: KR Kyoungki-do
  • Assignee: Hynix Semiconductor Inc.
  • Current Assignee: Hynix Semiconductor Inc.
  • Current Assignee Address: KR Kyoungki-do
  • Agency: Ladas & Parry LLP
  • Priority: KR10-2007-0113313 20071107
  • Main IPC: H01L21/76
  • IPC: H01L21/76
Phase change memory device capable of increasing sensing margin and method for manufacturing the same
Abstract:
A phase change memory device capable of increasing a sensing margin and a method for manufacturing the same. The phase change memory device includes a semiconductor substrate formed with a device isolation structure which defines active regions; first conductivity type impurity regions formed in surfaces of the active regions and having the shape of a line; a second conductivity type well formed in the semiconductor substrate at a position lower than the device isolation structure; a second conductivity type ion-implantation layer formed in the semiconductor substrate at a boundary between a lower end of the device isolation structure and the semiconductor substrate; a plurality of vertical PN diodes formed on the first conductivity type impurity regions; and phase change memory cells formed on the vertical PN diodes.
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