Invention Grant
- Patent Title: Devices with gate-to-gate isolation structures and methods of manufacture
-
Application No.: US12902803Application Date: 2010-10-12
-
Publication No.: US08455330B2Publication Date: 2013-06-04
- Inventor: Brent A. Anderson , Edward J. Nowak , Jed H. Rankin
- Applicant: Brent A. Anderson , Edward J. Nowak , Jed H. Rankin
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Roberts Mlotkowski Safran & Cole, P.C.
- Agent Richard Kotulak
- Main IPC: H01L21/76
- IPC: H01L21/76

Abstract:
Devices having gate-to-gate isolation structures and methods of manufacture are provided. The method includes forming a plurality of isolation structures in pad films and an underlying substrate. The method further includes forming a plurality of fins including the isolation structures and a second plurality of fins including the two pad films and a portion of the underlying substrate, each of which are separated by a trench. The method further includes removing portions of the second plurality of fins resulting in a height lower than a height of the plurality of fins including the isolation structures. The method further includes forming gate electrodes within each trench, burying the second plurality of fins and abutting sides of the plurality of fins including the isolation structures. The plurality of fins including the isolation structures electrically and physically isolate adjacent gate electrode of the gate electrodes.
Public/Granted literature
- US20120086078A1 DEVICES WITH GATE-TO-GATE ISOLATION STRUCTURES AND METHODS OF MANUFACTURE Public/Granted day:2012-04-12
Information query
IPC分类: