Invention Grant
US08455333B2 Method for reuse of wafers for growth of vertically-aligned wire arrays
有权
用于重新生长垂直排列的线阵列的晶片的方法
- Patent Title: Method for reuse of wafers for growth of vertically-aligned wire arrays
- Patent Title (中): 用于重新生长垂直排列的线阵列的晶片的方法
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Application No.: US13550395Application Date: 2012-07-16
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Publication No.: US08455333B2Publication Date: 2013-06-04
- Inventor: Joshua M. Spurgeon , Katherine E. Plass , Nathan S. Lewis , Harry A. Atwater
- Applicant: Joshua M. Spurgeon , Katherine E. Plass , Nathan S. Lewis , Harry A. Atwater
- Applicant Address: US CA Pasadena
- Assignee: California Institute of Technology
- Current Assignee: California Institute of Technology
- Current Assignee Address: US CA Pasadena
- Agency: Gavrilovich, Dodd & Lindsey LLP
- Agent Joseph R. Baker, Jr.
- Main IPC: H01L21/36
- IPC: H01L21/36 ; H01L21/20 ; H01L21/00 ; H01L29/00
Abstract:
Reusing a Si wafer for the formation of wire arrays by transferring the wire arrays to a polymer matrix, reusing a patterned oxide for several array growths, and finally polishing and reoxidizing the wafer surface and reapplying the patterned oxide.
Public/Granted literature
- US20120282761A1 METHOD FOR REUSE OF WAFERS FOR GROWTH OF VERTICALLY-ALIGNED WIRE ARRAYS Public/Granted day:2012-11-08
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