Invention Grant
- Patent Title: Method for manufacturing nonvolatile memory device
- Patent Title (中): 非易失性存储器件的制造方法
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Application No.: US13075658Application Date: 2011-03-30
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Publication No.: US08455346B2Publication Date: 2013-06-04
- Inventor: Yasuhiro Nojiri , Hiroyuki Fukumizu , Shinichi Nakao , Kei Watanabe , Kazuhiko Yamamoto , Ichiro Mizushima , Yoshio Ozawa
- Applicant: Yasuhiro Nojiri , Hiroyuki Fukumizu , Shinichi Nakao , Kei Watanabe , Kazuhiko Yamamoto , Ichiro Mizushima , Yoshio Ozawa
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2010-133411 20100610; JP2011-37238 20110223
- Main IPC: H01L21/4763
- IPC: H01L21/4763 ; G11C11/00

Abstract:
According to one embodiment, a method is disclosed for manufacturing a nonvolatile memory device. The nonvolatile memory device includes a memory cell connected to a first interconnect and a second interconnect. The method can include forming a first electrode film on the first interconnect. The method can include forming a layer including a plurality of carbon nanotubes dispersed inside an insulator on the first electrode film. At least one carbon nanotube of the plurality of carbon nanotubes is exposed from a surface of the insulator. The method can include forming a second electrode film on the layer. In addition, the method can include forming a second interconnect on the second electrode film.
Public/Granted literature
- US20110306199A1 METHOD FOR MANUFACTURING NONVOLATILE MEMORY DEVICE Public/Granted day:2011-12-15
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