Invention Grant
US08455787B2 Laser processing apparatus, process control apparatus, and processing apparatus 有权
激光加工装置,过程控制装置和处理装置

  • Patent Title: Laser processing apparatus, process control apparatus, and processing apparatus
  • Patent Title (中): 激光加工装置,过程控制装置和处理装置
  • Application No.: US12665574
    Application Date: 2008-07-04
  • Publication No.: US08455787B2
    Publication Date: 2013-06-04
  • Inventor: Hiroko Takada
  • Applicant: Hiroko Takada
  • Applicant Address: JP Tokyo
  • Assignee: Mitsubishi Electric Corporation
  • Current Assignee: Mitsubishi Electric Corporation
  • Current Assignee Address: JP Tokyo
  • Agency: Sughrue Mion, PLLC
  • Priority: JP2007-176371 20070704
  • International Application: PCT/JP2008/062177 WO 20080704
  • International Announcement: WO2009/005145 WO 20090108
  • Main IPC: B23K26/00
  • IPC: B23K26/00
Laser processing apparatus, process control apparatus, and processing apparatus
Abstract:
A laser processing apparatus in which a workpiece is placed on a work support base that supports the workpiece at a plurality of support points and performs, while moving a processing head in a horizontal direction with respect to the workpiece, laser processing on the workpiece on the work support base by the processing head, includes a tilt judging unit that judges, based on a positional relationship between a product chip that is to be separated from the workpiece when the workpiece is subjected to laser processing and support points, whether the product chip tilts in a height direction and projects upward on a side of the processing head from the workpiece before laser processing; and a drive control unit that controls a height of the processing head with respect to the workpiece when moving the processing head to a processing position for a next product chip after completing laser processing on the product chip based on a judgment result of the tilt judging unit.
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